(鄭州大學(xué) 物理學(xué)院，鄭州 450001)
摘 要: 基于分子動(dòng)力學(xué)方法研究不同澆鑄溫度和澆鑄時(shí)間對(duì)Cu/Al多層膜連接過程界面擴(kuò)散的影響，從力學(xué)性能和位錯(cuò)滑移方面，對(duì)比研究不同澆鑄時(shí)間和澆鑄溫度下Cu/Al多層膜的拉伸變形，揭示微觀原子結(jié)構(gòu)對(duì)金屬薄膜力學(xué)性能的影響。結(jié)果表明：隨著澆鑄溫度和澆鑄時(shí)間增加，界面區(qū)域的Cu、Al原子相互擴(kuò)散數(shù)目增多，過渡層厚度增大，Cu/Al多層膜屈服強(qiáng)度和抗拉強(qiáng)度隨澆鑄時(shí)間增加先增加后降低，在澆鑄溫度為1013 K、澆鑄時(shí)間為0.2 ns時(shí)，Cu/Al多層膜的力學(xué)性能最佳。
關(guān)鍵字: 分子動(dòng)力學(xué)；澆鑄；Cu/Al多層膜；界面擴(kuò)散
（School of Physics, Zhengzhou University, Zhengzhou 450001, China）
Abstract:The effects of different casting temperature and casting time on the interfacial diffusion of Cu/Al multilayer films were studied based on the molecular dynamics method. The tensile deformation of Cu/Al multilayer films under different casting time and casting temperature was compared from the aspects of mechanical properties and dislocation slip, and the effects of microatomic structure and the mechanical properties of metal films were revealed. The results show that the thickness of transition layer and the number of Cu and Al atoms diffusing each other near the interface both increase with the increase of casting temperature and casting time. The yield strength and tensile strength of Cu/Al multilayer films also increase at first and then decrease with the increase of casting temperature and casting time. When the casting temperature is 1013 K and the casting time is 0.2 ns, the mechanical properties of Cu/Al multilayers are the best.
Key words: molecular dynamics; casting; Cu/Al multilayer film; interface diffusion
