(浙江工業(yè)大學(xué) 材料科學(xué)與工程學(xué)院，杭州 310014)
摘 要: 采用磁控濺射法在200 ℃Si(100)基體上交替沉積WSx和類金剛石碳膜(DLC)制備不同調(diào)制比的DLC/WSx多層膜(周期為10 nm)。利用掃描電鏡(SEM)、能譜儀(EDS)、X射線衍射儀(XRD)、X射線光電子譜(XPS)等手段分析調(diào)制比對多層膜成分、微觀結(jié)構(gòu)及界面的影響。利用薄膜應(yīng)力測試儀、納米壓痕儀、涂層附著力劃痕儀和球盤式摩擦磨損試驗(yàn)機(jī)等測試多層膜的力學(xué)性能及大氣中的摩擦磨損性能。結(jié)果表明：DLC/WSx多層膜結(jié)構(gòu)致密而平整，界面強(qiáng)化效應(yīng)明顯，膜中WSx均為非晶結(jié)構(gòu)。隨著調(diào)制比增大，多層膜的n(S)/n(W)由0.77增大至1.08，硬度先降低后升高，膜內(nèi)壓應(yīng)力逐漸減小，結(jié)合力先增大后減小，摩擦因數(shù)由0.307降至0.171，磨損率逐漸上升。調(diào)制比為1:39的多層膜性能最優(yōu)，硬度可達(dá)11.4 GPa，磨損率低至1.17×10-15 m3？N-1？m-1，顯著優(yōu)于純WSx薄膜的。
關(guān)鍵字: WS2；類金剛石碳；多層膜；調(diào)制比；顯微組織；摩擦；磨損
（College of materials science and engineering, Zhejiang University of Technology, Hangzhou 310014, China）
Abstract:The DLC/WSx multilayer films with various modulation ratios and modulation period of 10 nm were layer-by-layer deposited on Si(100) substrates by magnetron sputtering method at 200 ℃. The effects of modulation ratio on the chemical composition, microstructure and interface of the films were characterized by means of scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), X-ray diffractometry (XRD) and X-ray photoelectron spectroscopy (XPS). The mechanical properties and tribological properties in atmosphere of the films were evaluated by residual stress tester, nano-indentation tester, scratch tester and ball-on-disc tribotester. The results show that DLC/WSx multilayers are compact and smooth, the strengthening of interfacial effect is remarkable and WSx phase is defined as amorphous structure. As the modulation ratio increasing, the molar ratio of S and W increases from 0.77 to 1.08, the hardness decreases first and then increases while the compressive stress decreases in the film gradually, the adhesion to substrate increases first and then decreases, the friction coefficient decreases from 0.307 to 0.171, and the wear rate increases. Compared with pure WSx film, DLC/WSx multilayer films have much better mechanical properties, and the film with modulation ratio of 1:39 has the best performance, its hardness is 11.4 GPa and its wear rate is of 1.17×10-15 m3？N-1？m-1.
Key words: WS2; diamond like carbon; multilayer; modulation ratio; microstructure; friction; wear
