(1．湖南大學 材料科學與工程學院，長沙 410082； 2．湖南大學 湖南省噴射沉積技術重點實驗室，長沙 410082)
摘 要: 采用恒流陽極氧化法，制備出低孔隙率高絕緣特性的陽極氧化鋁膜(AAO膜)，研究乙二醇(EG)對AAO膜顯微結構及其絕緣性能的影響。采用X射線衍射(XRD)、掃描電子顯微鏡(SEM)及絕緣性能測試儀對AAO膜的物相組成、顯微形貌及其絕緣性能進行測試表征。結果表明，當EG體積分數(shù)為40%時，可獲得孔隙率為1.0%的AAO膜，此時AAO膜絕緣電阻率達到最高值5.4×1013 Ω×cm；當EG體積分數(shù)為50%時，AAO膜的擊穿場強達到最優(yōu)值44.8 V/μm。草酸電解液中添加有機物EG可極大地降低AAO膜多孔層孔隙率，提高阻擋層厚度，大幅度提升AAO膜的絕緣性能。
關鍵字: 陽極氧化鋁；有機物；低孔隙率；絕緣性能
（1. College of Materials Science and Engineering, Hunan University, Changsha 410082, China; 2. Hunan Province Key Laboratory for Spray Deposition Technology and Application, Hunan University, Changsha 410082, China）
Abstract:Anodic alumina oxide (AAO) films with low porosity and high insulation property were prepared by galvanostatic anodization method. The effects of ethylene glycol (EG) addition on both the morphology and the insulation property of anodic alumina were evaluated. The composition, microstructure and insulation property of the AAO films were detected by X-ray diffracometry (XRD), scanning electron microscopy (SEM) and insulation performance tester, respectively. The results show that when the volume fraction of EG is 40%, the porosity of the AAO film is only 1.0%, and the resistivity reaches 5.4×1013 Ω×cm. When the volume fraction of EG is 50%, the breakdown strength of AAO film reaches 44.8 V/μm. The proper addition of ethylene glycol in oxalic acid aqueous could greatly reduce the porosity of the porous layer and increase the barrier thickness, which dominates the high density and great insulation property of the films.
Key words: anodic alumina; organics; low porosity; insulation property
