(西安建筑科技大學(xué) 材料與礦資學(xué)院，西安 710055)
摘 要: 以NH4F和乙二醇為電解液，采用陽極氧化法在Ti3SiC2表面制備納米多孔結(jié)構(gòu)，研究陽極氧化電壓、電解液濃度和氧化時(shí)間對納米多孔結(jié)構(gòu)形成的影響。利用場發(fā)射掃描電子顯微鏡(FE-SEM)、X射線衍射儀(XRD)和X射線光電子能譜(XPS)對納米多孔結(jié)構(gòu)進(jìn)行表征。結(jié)果表明：孔徑隨著氧化電壓的升高而增大，且延長氧化時(shí)間有利于制備孔徑均勻的納米孔；Ti3SiC2試樣經(jīng)陽極氧化后除含有Ti、Si、C元素外，還含有O元素，且以TiO2的形態(tài)存在。
關(guān)鍵字: Ti3SiC2；陽極氧化；納米孔；電解液；氧化電壓
（College of Materials and Mineral Resource, Xi’an University of Architecture and Technology, Xi’an 710055, China）
Abstract:Nanopore arrays were fabricated on the surface of Ti3SiC2 in ethylene glycol and NH4F electrolyte by anodic oxidation. The influences of anodizing potential, concentration of the electrolyte and anodizing time on the micrograph of the nanopore arrays were investigated. The morphology, size and composition of nanopore arrays were characterized by field-emission scanning electron microscopy (FE-SEM), X-ray diffractometry (XRD) and X-ray photoelectron spectroscopy (XPS). The results show that the average hole diameter increases with the increase of anodizing voltage and the deviation of the hole diameter reduces with extending anodizing time. In addition to containing Ti, Si, C element, Ti3SiC2 sample contains O element that exists in the form of TiO2.
Key words: Ti3SiC2; anodic oxidation; nanopore; electrolyte; anodizing potential
