(1. 中國科學(xué)院 金屬研究所 專用材料與器件研究部，沈陽 110016；
2. 大連理工大學(xué) 三束材料改性教育部重點(diǎn)實(shí)驗室，大連 116024；
3. 中國科學(xué)院 金屬研究所 金屬腐蝕與防護(hù)實(shí)驗室，沈陽110016)
摘 要: 采用磁場增強(qiáng)電弧離子鍍技術(shù)，通過改變位于靶材后方的軸向磁場強(qiáng)度，在2024Al合金表面沉積CrN薄膜，研究磁場強(qiáng)度對薄膜顯微組織、顯微硬度及耐腐蝕性能的影響。結(jié)果表明：隨著磁場強(qiáng)度的增加，CrN薄膜結(jié)構(gòu)由Cr2N與CrN的混合相逐漸轉(zhuǎn)變?yōu)镃rN的單一相結(jié)構(gòu)；磁場強(qiáng)度對薄膜表面形貌有明顯影響，隨著磁場強(qiáng)度的增加，薄膜表面小顆粒的數(shù)量逐漸減少，較大尺寸顆粒的數(shù)量有所增加；CrN薄膜的顯微硬度和彈性模量在磁場強(qiáng)度為7960 A/m時達(dá)到最大值，分別為23.9 GPa與392.6 GPa；CrN薄膜的陽極極化曲線的腐蝕電位隨著磁場強(qiáng)度的增加先增加而后降低，在磁場強(qiáng)度為3184 A/m時，具有最大值，即具有較好的抗腐蝕性。
關(guān)鍵字: CrN薄膜；磁場；電弧離子鍍；顯微組織；耐腐蝕性
（1. Specialized Materials and Devices Division, Institute of Metal Research,
Chinese Academy of Sciences, Shenyang 110016, China;
2. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education,
Dalian University of Technology, Dalian 116024, China;
3. Laboratory of Metal Corrosion and Protection, Institute of Metal Research,
Chinese Academy of Sciences, Shenyang 110016, China）
Abstract:The CrN films were prepared using magnetic field-enhanced arc ion plating on 2024 Al alloy substrates, and the effect of axial magnetic field intensity behind the cathodic target on microstructure, microhardness and corrosion properties of film was investigated. The results show that, with the increase of the magnetic field intensity, the complex structures of Cr2N and CrN phase in the CrN films change to single phase of CrN, magnetic field has obvious effect on surface morphologies of film, the number of smaller particles reduces and the number of larger particles increases. When the magnetic field intensity is 7960 A/m, the microhardness and elastic modulus of the films reach the maximum values, which are 23.9 GPa and 392.6 GPa, respectively. The corrosion potentials of polarization curves firstly increase, and then decrease with the increase of the magnetic field intensity. The maximum value of the corrosion potential is obtained at the magnetic field intensity of 3184 A/m, namely, corresponding to the best corrosive resistance.
Key words: CrN film; magnetic field; arc ion plating; microstructure; corrosion resistance
