(1. 江西理工大學 材料科學與工程學院，贛州 341000；
2. 江西理工大學 鎢資源高效開發(fā)及應用技術(shù)教育部工程研究中心，贛州 341000；
3. 中國科學院 寧波材料技術(shù)與工程研究所 海洋新材料與應用技術(shù)重點實驗室，寧波 315201)
摘 要: 采用多弧離子鍍技術(shù)在硅片和316L不銹鋼上制備了CrN和CrCN涂層，利用掃描電鏡(SEM)、電子能譜(EDS)、透射電鏡(TEM)、X射線光電子能譜儀(XPS)對其表面形貌及成分進行表征，采用納米壓痕儀、劃痕測試儀及摩擦磨損試驗機測試涂層力學及摩擦學性能，觀察試樣磨損形貌，并分析其磨損機理。結(jié)果表明：較之于CrN涂層，所制備的CrCN涂層具有更均勻、致密的結(jié)構(gòu)，與基體結(jié)合良好；涂層主要成分為Cr、C和N，其中C元素主要以sp2、sp3和C—Cr鍵的形式存在；CrCN涂層中由于強化相Cr7C3的產(chǎn)生和雜化C的形成等多種強化作用，顯著提高了其硬度和耐摩擦磨損性能。
關(guān)鍵字: CrCN涂層；CrN涂層；顯微組織；硬度；摩擦；磨損性能
（1. School of Materials Science and Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China;
2. Engineering Research Center of High-efficiency Development and Application Technology of Tungsten Resources, Ministry of Education, Jiangxi University of Science and Technology, Ganzhou 341000, China;
3. Key Laboratory of Marine New Materials and Related Technology,
Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China）
Abstract:CrN and CrCN coating were prepared on single crystal Si and 316L stainless steel by arc ion plating. The surface morphology, microstructures, phase compositions and performance of the CrCN coating were characterized by SEM, EDS TEM, XRD, XPS, EDS, nanoindentation, scratch test and wear tester. The surface morphologies after wear were observed and the wear mechanism was discussed. The results show that CrCN coating has obvious flaws and better bond with the matrix than CrN coating. The composition of CrCN coating mainly contains Cr, C and N. sp2, sp3 and Cr—C bonds dominate in the carbon bonding. Because of the reinforced Cr7C3 particulate and the formation of hybrid carbon, the hardness, tribological properties and wear resistant of CrCN coating can be enhanced.
Key words: CrCN coating; CrN coating; microstructure; hardness; wear; tribological property
