(中南大學 粉末冶金國家重點實驗室，長沙 410083)
摘 要: 采用ZrCl4-CO2-H2-Ar體系，于900~1 500 ℃下用常壓化學氣相沉積法(APCVD)在C/C-SiC和C/C-ZrC基體上分別制備ZrO2涂層。采用X射線衍射分析儀(XRD)和掃描電鏡(SEM)分別分析ZrO2涂層的相組成和形貌特征。利用微/納米力學綜合測試儀測量涂層的微觀力學性能及與底層的界面結(jié)合力。結(jié)果表明：在900、1 150、1 300和1 500 ℃這4種溫度下制備的ZrO2涂層均為單斜相；隨著沉積溫度的升高，ZrO2涂層表面形貌由小顆粒堆積態(tài)向大尺寸多晶轉(zhuǎn)變，涂層厚度逐漸增加。化學氣相沉積ZrO2涂層硬度為1 026.712HV，略低于電子束物理氣相沉積ZrO2涂層的硬度；ZrO2涂層與C/C-SiC基體之間的結(jié)合強度高于ZrO2涂層與C/C-ZrC基體之間的結(jié)合強度。掃描電鏡觀察顯示：C/C-SiC基體ZrO2涂層劃痕表面光滑，而C/C-ZrC基體ZrO2涂層劃痕表面粗糙。
關(guān)鍵字: 氧化鋯涂層；化學氣相沉積；沉積溫度；顯微結(jié)構(gòu)；微觀力學性能
（State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China）
Abstract:Zirconia coatings were deposited on C/C-SiC and C/C-ZrC substrates by atmospheric pressure chemical vapor deposition (APCVD) with ZrCl4-CO2-H2-Ar system at 900-1 500 ℃, respectively. The phase composition and surface morphologies of the ZrO2 coatings were investigated by X-ray diffractometry (XRD) and scanning electron microscopy (SEM), respectively. The micro-mechanical properties of the coatings and the bonding strength between the coatings and substrates were tested by the micro/nano comprehensive mechanical property test instrument. The results show that the ZrO2 coatings prepared at four different temperatures of 900, 1 150, 1 300 and 1 500 ℃ are monoclinic phase ZiO2. The surface morphology of the coating changes from accumulation of small grains to polycrystal with large size as the temperature increases, at the same time the thickness of the coatings increases. The microhardness of the coating is 1 026.712HV, which is a little lower than that of ZrO2 coating prepared by electron beam physical vapor deposition and the ZrO2 coating combines better with C/C-SiC substrate than that with C/C-ZrC substrate. The results of SEM show that the surface scratch of ZrO2 coatings on C/C-SiC substrate is smooth while that is rough on C/C-ZrC substrate.
Key words: ZrO2 coatings; chemical vapor deposition; deposition temperature; microstructure; micro-mechanical properties
