(江蘇科技大學(xué) 江蘇省先進(jìn)焊接技術(shù)重點(diǎn)實(shí)驗(yàn)室，鎮(zhèn)江 212003)
摘 要: 通過磁控濺射技術(shù)制備一系列不同石墨靶功率的TiCN復(fù)合膜。分別利用X射線衍射儀、納米壓痕儀和高溫摩擦磨損儀研究薄膜的微觀結(jié)構(gòu)、力學(xué)性能及室溫和高溫摩擦磨損性能。結(jié)果表明：隨著石墨靶功率的增加，TiCN(111)峰逐漸寬化，晶粒尺寸逐漸減小，薄膜最后接近非晶結(jié)構(gòu)。薄膜的硬度與彈性模量呈先增大后減小的趨勢，在石墨靶功率為90 W時(shí)薄膜的硬度和彈性模量最大，分別為28.2和230 GPa。隨著石墨靶功率的增加，室溫下TiCN復(fù)合膜的摩擦因數(shù)逐漸減小，TiCN復(fù)合膜的耐磨性能明顯提高。當(dāng)環(huán)境溫度升高到300~500 ℃時(shí)，TiCN薄膜的摩擦因數(shù)明顯增大。TiCN復(fù)合膜的摩擦磨損性能受薄膜微觀結(jié)構(gòu)、空氣中的水蒸氣和氧氣及環(huán)境溫度等一系列因素的影響。
關(guān)鍵字: TiCN膜；磁控濺射；微結(jié)構(gòu)；力學(xué)性能；摩擦；磨損
（Key Laboratory of Advanced Welding Technology, Jiangsu University of Science and Technology,
Zhenjiang 212003, China）
Abstract:A series of TiCN nano-composite films with different powers of graphite target were prepared by magnetron sputtering technique. The microstructure and mechanical properties and friction and wear properties at room and high temperature of the films were investigated by X-ray diffractometer, CSM nano-indentation and high-temperature ball-on-disc tribometer. The results show that with the increase of the power of graphite target, the peak of TiN(111) becomes broad while the size of the grain becomes small, and the structure is close to the amorphous structure eventually. Along with carbon join, the films are hard and the hardness and elastic modulus increase. When the power of graphite target is 90 W, the two parameters reach the highest, 28.2 and 230 GPa, respectively. The friction coefficients of TiCN films at room temperature decrease and the traction-resistance property is obviously improved with increasing the power of graphite target. When the temperature reaches 300−500 ℃, the friction coefficient of TiCN films increases. The friction and wear properties of TiCN composite films are influenced by a series of factors such as the microstructure, water vapor and oxygen in the air and the ambient temperature.
Key words: film TiCN; magnetron sputtering; microstructure; mechanical property; friction; wear
