(中南大學(xué) 材料科學(xué)與工程學(xué)院，長(zhǎng)沙 410083)
摘 要: 氧化鋅鋁是一種具有廣闊應(yīng)用前景和發(fā)展?jié)摿Φ膹?fù)合氧化物半導(dǎo)體材料。介紹ZAO材料的透明導(dǎo)電性、光致發(fā)光和紅外發(fā)射等典型性能；討論溶膠−凝膠法、水熱法、沸水回流法和共沉淀法等粉體制備方法；闡述ZAO靶材的制備方法；分析溶膠−凝膠、金屬化學(xué)氣相沉積、磁控濺射、脈沖激光沉積和熱噴霧分解等ZAO薄膜的制備技術(shù)；最后指出ZAO的發(fā)展方向。
關(guān)鍵字: 氧化鋅鋁；典型性能；制備技術(shù)；粉體；靶材；薄膜
（School of Materials Science and Engineering, Central South University, Changsha 410083, China）
Abstract:The Al-doped-ZnO (ZAO) is a kind of complex oxide semiconductor with wide application prospect and development potentiality. The typical properties, such as transparent conductivity, photoluminescence and infrared reflection, were introduced. Several synthesis processes, such as sol-gel method, hydrothermal method, refluxing method and co-precipitation method, were discussed. The preparation processes of ZAO were expounded. The preparation technologies, namely sol-gel method, metal chemical vapor deposition, magnetron sputtering, pulsed laser deposition and thermal spray of ZAO films were analyzed. Finally, the directions of research and development were described.
Key words: Al-doped-ZnO; typical properties; preparation processes; powder; targets; thin films
