(1. 福州大學 物理與信息工程學院, 福州 350108；2. 福州大學 材料研究所, 福州 350108)
摘 要: 采用熱分解法制備Ru-Ti-Ir-Ta四元金屬氧化物鈦陽極涂層。通過XRD、SEM、EDX和HRTEM等測試手段分析不同溫度下鈦陽極涂層的物相組織結構、晶粒大小、組元分布和微觀形貌。結果表明：在500 ℃獲得的涂層物相主要由等軸狀的Ti基(Ti, Ru, Ir)O2 和Ir基(Ir, Ti, Ru)O2金紅石固溶體構成，晶粒尺寸分別約為15 nm和8 nm，涂層形貌呈典型“泥裂狀”，涂層表面出現(xiàn)一次裂紋和二次裂紋；在700 ℃獲得的涂層組成相以Ir基(Ir, Ti, Ru)O2和Ti基(Ti, Ru, Ir)O2金紅石固溶體為主，平均晶粒尺寸分別約為18 nm和12 nm，含有少量的平均晶粒尺寸約為29 nm的Ru基(Ru, Ti, Ir)O2金紅石固溶體。3種固溶體的晶粒形貌均以等軸狀為主，涂層表面形貌具有“泥裂狀”特征，涂層表面出現(xiàn)一次裂紋、二次裂紋以及三次裂紋，Ir和Ru以固溶相的形式在二次裂紋邊緣處析出。
關鍵字: Ru-Ti-Ir-Ta四元氧化物涂層；鈦陽極；納米材料；熱處理
Ru-Ti-Ir-Ta quaternary oxide coating
（1. College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China;
2. Institute for Materials Research, Fuzhou University, Fuzhou 350108, China）
Abstract:The Ru-Ti-Ir-Ta quaternary oxide titanium anode coatings were prepared by thermal decomposition. The phase structures, crystal sizes, element distributions, microstructures and morphologies of titanium anode coatings were analyzed by means of XRD, SEM, EDX and HRTEM. The results show that when heat-treated at 500 ℃, the main phases in the coating are rutile-type TiO2-based solid solution (Ti, Ru, Ir)O2 and IrO2-based solid solution (Ir, Ti, Ru)O2 in a form of quadrangular prism, and their grain sizes are about 15 nm and 8 nm, respectively. The titanium anode coating has distinctly dry cracked-mud in morphology. The coating contains primary cracks and secondary cracks. Comparatively, when heat-treated at 700 ℃, the main phases in the coating are similarly to those at 500 ℃, their grain sizes are about 18 nm and 12 nm, respectively. However, there exits a few RuO2-based solid solution (Ru, Ti, Ir)O2 particles whose sizes are 29 nm. All of the grains take a form of quadrangular prism. The titanium anode coating has the dry cracked-mud in morphology, and contains primary cracks, secondary cracks and third cracks. At the edge of the secondary cracks, Ir- and RuO2-based solid solutions (Ir, Ti, Ru) and (Ru, Ti, Ir)O2 are deposited.
Key words: Ru-Ti-Ir-Ta quaternary oxide coating; titanium anode; nanometer materials; heat treatment
