(1. 上海交通大學(xué) 材料科學(xué)與工程學(xué)院，上海 200240；
2. 上海交通大學(xué) 納米技術(shù)及應(yīng)用國家工程研究中心，上海 200241)
摘 要: 為了擴(kuò)展在潮濕條件下WS2/MoS2復(fù)合薄膜的應(yīng)用，使用WS2/MoS2作靶材，在Ar/C2H2氣氛中通過反應(yīng)濺射法制備WS2/MoS2/C復(fù)合薄膜。利用X射線衍射儀(XRD)、X射線能譜儀(EDX)、場發(fā)射掃描電子顯微鏡(FESEM)、MFT-4000材料表面性能試驗儀表征薄膜的性能以便評價薄膜的微結(jié)構(gòu)與摩擦性能的關(guān)系。結(jié)果表明：與純MoS2薄膜相比，WS2/MoS2/C復(fù)合薄膜結(jié)構(gòu)致密，硬度提高一個數(shù)量級；在潮濕的大氣中復(fù)合薄膜的摩擦因數(shù)更低，抗磨損能力更強。
關(guān)鍵字: WS2；MoS2；C；摩擦性能；磨損性能
WS2/MoS2/C composite films
（1. School of Materials Science and Engineering, Shanghai Jiao Tong University,
Shanghai 200240, China;
2. National Engineering Research Center of Nanotechnology, Shanghai Jiao Tong University,
Shanghai 200241, China）
Abstract:In order to expand the application of WS2/MoS2 films under humid conditions, WS2/MoS2/C composite films were prepared in Ar/C2H2 atmosphere by magnetron reaction-sputtering with a WS2/MoS2 composite target. X-ray diffractometer, energy dispersive X-ray detector, field emission scanning electron microscope and MFT-4000 material surface property tester were used to investigate the relationship between the microstructure and the tribological performance of the films. The results show that the composite films have compact microstructures with lower friction coefficients and better wear resistances than pure MoS2 film under humid atmospheric conditions at room temperature, and their hardness is nearly increased by one order of magnitude.
Key words: WS2; MoS2; C; tribological property; wear property
