(哈爾濱理工大學(xué)材料科學(xué)與工程學(xué)院, 哈爾濱150080)
摘 要: 探討了用HCD法在玻璃基板上制備的Ti-43.2 7%Ni形狀記憶合金薄膜和經(jīng)不同熱處理后的組織結(jié)構(gòu)。結(jié)果表明，當(dāng)鍍膜的基板溫度較高時(shí)，所得的薄膜基本晶化，其組織為由馬氏體、 R相、母相和Ti2Ni 析出相等組成的多晶體。經(jīng)熱處理后，母相量增加，馬氏體量減少，表明熱處理使Ms 點(diǎn)下降。利用這一現(xiàn)象，可擴(kuò)大記憶合金薄膜的使用溫度范圍。在由室溫加熱到110 ℃的動(dòng)態(tài)觀察中發(fā)現(xiàn)，多晶體中的馬氏體逐步縮小、消失，轉(zhuǎn)變成母相、R相，表現(xiàn)出熱彈性，并且伴隨有Ti2Ni 相析出。
關(guān)鍵字: 形狀記憶合金；富鈦薄膜；組織結(jié)構(gòu)
（College of Materials Science and Engineering,
Harbin University of Science and Technology, Harbin 150080, P.R.China）
Abstract:The morphology and structure of the SMA thin film of Ti-43.27% Ni formed by H CD sputter-deposition on glass substrates were studied. The results showed that when the temperature of the substrate is sufficiently high in the process of sputter-depositing film,the thin film is basically crystallized and its morphology is polycrystal consisting of martensite, R， Ti2Ni and parent phase. Because the relative quantity of parent phase increases and that of martensite decreases after heat treatment, Ms temperature drops,the using temperature range of SMA thin film is expanded. Observed in situ from room temperature up to 110 ℃，the martensite in the polymorphy is reduced continuously until it disappears, and all transformated into R，Ti2Ni and parent phase in the end, which means the martensite shows thermoelasticity.
Key words: shape memory alloy; rich Ti thin film; structure and morphology
