(1. 中國(guó)科學(xué)院力學(xué)研究所材料工程中心，北京 100080；
2. 太原理工大學(xué)表面工程研究所，太原030024)
摘 要: 對(duì)雙層輝光離子鎢鉬共滲在離子轟擊條件下形成的滲層和無(wú)離子轟擊時(shí)形成的滲層進(jìn)行了對(duì)比，計(jì)算了溶質(zhì)原子鎢和鉬與空位的結(jié)合能。據(jù)溶質(zhì)-空位復(fù)合體擴(kuò)散的能量條件，提出溶質(zhì)-空位復(fù)合體擴(kuò)散機(jī)制在雙層輝光離子鎢鉬共滲中起重要作用。由此解釋了雙層輝光離子鎢鉬共滲的W和Mo原子快速擴(kuò)散現(xiàn)象和滲后冷卻中大量金屬間化合物在晶界的析出。
關(guān)鍵字: 離子轟擊；鎢鉬共滲；溶質(zhì)-空位復(fù)合體；擴(kuò)散
（1. Center of Material Engineering, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, P.R.China;
2. Research Institute of Surface Engineering, Taiyuan University of Technology, Taiyuan 030024, P.R.China）
Abstract:The W-Mo alloy layers were obtained by double glow plasma surface alloying technique. The alloying results were compared between processing conditions: with or without ion bombardment on the surface of substrate. The binding energy of vacancy with the solute atoms of W and Mo was calculated. According to the energy condition of solute-vacancy complex diffusion, the mechanism of solute-vacancy diffusion played an important role in the double glow plasma surface alloying process. The results explained the high diffusion efficiency of W-Mo atoms in the alloying process and gave the precipitation of large quantity of intermetallics at grain boundaries during the cooling process after the alloying treatment.
Key words: ion bombardment; W-Mo surface alloying; solute-vacancy complex; diffusion
