(1. 華南理工大學(xué) 材料科學(xué)與工程學(xué)院，廣州 510640；
2. 廣東省世創(chuàng)金屬科技有限公司，佛山 528313)
摘 要: 利用離子氮化形成過渡層，通過改變?yōu)R射沉積工藝參數(shù)，制備了TiAlCrN和TiAlCrN/CrN多層復(fù)合膜。采用電子探針(EPMA)、掃描電子顯微鏡(SEM)、X射線衍射儀(XRD)、納米壓痕儀及微米劃痕儀等技術(shù)表征兩種復(fù)合膜的成分結(jié)構(gòu)和力學(xué)性能。結(jié)果表明：兩種膜都是面心立方結(jié)構(gòu)，TiAlCrN膜和TiAlCrN/CrN多層膜分別在(111)和(200)面具有一定的擇優(yōu)取向；TiAlCrN膜的結(jié)構(gòu)和成分都比較均勻，而TiAlCrN/CrN多層膜的結(jié)構(gòu)和成分則呈周期性變化。由于離子滲氮層的支撐作用及氮化物外延生長(zhǎng)，TiAlCrN/CrN多層膜的顯微硬度(3 450 HV)高于TiAlCrN膜的(2 500 HV)；兩種膜都具有較高的膜基結(jié)合力，但TiAlCrN/CrN多層膜的綜合力學(xué)性能比TiAlCrN膜的更好
關(guān)鍵字: TiAlCrN膜；TiAlCrN/CrN多層膜；電弧鍍；硬度；結(jié)合性能
（1. School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China)
2. Guangdong Strong Metal Technology Co. Ltd., Foshan 528313, China）
Abstract:TiAlCrN and TiAlCrN/CrN composite coatings were prepared on the substrate of high speed steel (M2). The substrates were initially plasma nitrided (PN) to create a diffusion layer, and the arc ion plating was applied to deposit TiAlCrN and TiAlCrN/CrN multilayers. The microstructure of the deposited coatings was characterized by electron probe microanalysis (EPMA), scanning electron microscopy (SEM) and X-ray diffractometry (XRD). The results show that TiAlCrN and TiAlCrN/CrN coatings exhibit weak (111) and (200) orientations, respectively, though both of them have a crystal structure of FCC. The composition and microstructure of TiAlCrN coating are homogeneous and uniform. Compared with TiAlCrN coating, TiAlCrN/CrN multilayers tested by nanoindentation and microscratch with a periodic structure consisting of alternating TiAlCrN layer with thick of 400 nm and CrN layer with thick of 200 nm exhibit higher hardness of about 3 450 HV and higher adhesion strength of more than 100 N.
Key words: TiAlCrN coating; TiAlCrN/CrN multilayer coatings; arc ion plating; microhardness; adhesion properties
