(1. 北京科技大學 材料科學與工程學院, 北京 100083；
2. 太原理工大學 表面工程研究所, 太原 030024)
摘 要: 用朗繆爾單探針技術對離子滲金屬中的等離子體參數(shù)進行了診斷, 討論工藝參數(shù)對等離子體參數(shù)的影響。 結(jié)果表明, 隨著工件陰極電壓、 源極電壓和氣壓的增加, 等離子體密度增大。 利用等離子體參數(shù)結(jié)合放電特征對工藝參數(shù)進行了優(yōu)化限定。 討論了等離子體參數(shù)對滲層成分的影響。
關鍵字: 等離子體參數(shù)； 工藝參數(shù)； 表面成分
LU Fan-xiu1, TANG Wei-zhong1
（1. School of Materials Science and Engineering University of Science and Technology Beijing, Beijing 100083, China；
2. Institute of Surface Engineering,
Taiyuan University of Technology, Taiyuan 030024, China）
Abstract:Langmuir probe technique was used for the plasma diagnostics of double-glow plasma surface alloying process. Effects of the process parameters on plasma parameters were discussed. It is shown that the plasma density increases with increasing workpiece voltage, source voltage and gas pressure. The process parameters are optimized and limited by considering the plasma parameters with discharge characteristics. The effect of plasma parameters on the surface composition of the alloyed layer was also discussed.
Key words: plasma parameter； process parameter； surface composition
