多層膜
(1. 北京科技大學(xué) 材料科學(xué)與工程學(xué)院，北京 100083；
2. 中國科學(xué)院 力學(xué)研究所， 北京 100080)
摘 要: 用過濾電弧技術(shù)在高速鋼表面沉積了TiN/TiCrN/CrN/CrTiN多層膜, 用掃描電鏡（SEM）觀察了截面和斷口形貌及劃痕后的形貌。 使用俄歇電子譜儀進(jìn)行剝層成分分析，用納米壓痕儀測試了多層膜和單層膜的顯微硬度和彈性模量。 結(jié)果表明， 在調(diào)制周期大于100nm時， 多層膜的顯微硬度符合Hall-Petch關(guān)系， 在80nm時， 則脫離線性關(guān)系。 劃痕法測試多層膜的結(jié)合力達(dá)到80N。
關(guān)鍵字: 顯微硬度; 結(jié)合力; 多層膜
cathode vacuum arc
CAO Er-yan2, LU Fan-xiu1
（1. College of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China;
2. Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China）
Abstract:TiN/TiCrN/CrN/CrTiN multilayer hard coatings were deposited on high speed steel substrates using a filtered cathodic vacuum arc technique. Morphology and composition were characterized with scanning electron microscopy (SEM) and auger electron spectroscopy (AES). Nanoindentation tests were performed to determine force-displacement curves which were used to calculate elastic modulus and nanohardness of coatings as a function of modulation period. It was observed that hardness of multilayer coatings was increased with decreasing modulation period. But the values of elastic modulus was less than that of TiN. A deviation from the Hall-Petch type of strengthening was observed in TiN/TiCrN/CrN/CrTiN multilayer hard coatings at 80nm of modulation period. The result of coatings adhesion was up to 80N by scratch tester.
Key words: hardness; adhesion; TiN/TiCrN/CrN/CrTiN multilayer hard coatings
