(1. 華東船舶工業(yè)學(xué)院 基礎(chǔ)學(xué)科系，鎮(zhèn)江 212003；
2. 華東船舶工業(yè)學(xué)院 材料與環(huán)境工程系，
鎮(zhèn)江 212003)
摘 要: 假設(shè)電場輔助陽極連接中玻璃的堿金屬離子耗盡層內(nèi)負(fù)電荷為均勻分布， 建立了耗盡層生長模型， 同時計算了耗盡層內(nèi)電場強度分布以及金屬陽極與玻璃之間的靜電引力。結(jié)果表明： 堿金屬離子耗盡層厚度以連接時間的雙曲正切函數(shù)形式增長； 界面電場強度隨連接時間單調(diào)上升， 而耗盡層外的玻璃內(nèi)電場強度單調(diào)下降； 電場輔助陽極連接是否完成決定于待連接表面間是否形成緊密接觸，而非電荷遷移量是否達(dá)到某一恒定值。 與實驗數(shù)據(jù)的比較表明， 該模型是合理的。
關(guān)鍵字: 電場輔助陽極連接； 玻璃； 堿金屬；
耗盡層； 電場強度
anodic bonding
（1．Department of Basic Courses，
East China Ship Building Institute of Technology，
Zhenjiang 212003, China；
2．Department of Materials and Environment Engineering，
East China Ship Building
Institute of Technology，Zhenjiang 212003， China）
Abstract:Based on the assumption of uniformly distributed negative charges in the alkali depletion layer of glass during the electric field assisted anodic bonding process， a theoretical model for the growth of the alkali depletion layer was proposed and the law controlling the growth of the depletion layer was deduced， and the electric field distribution in the depletion layer and electrostatic attraction between surfaces of metal anode and glass were calculated．The results show that the depletion layer grows in the form of hyperbolic tangent function of time， the electric field strength at the interface increases with bonding time to its maximum and the field strength in the bulk glass decreases， and that the fulfillment of the anodic bonding is determined by the completion of intimate contact rather than the charge transfer． Comparison between the results and experimental data indicates that the model is reasonable．
Key words: anodic bonding； glass； alkali metal； depletion-1ayer； electric field strength
