(哈爾濱工業(yè)大學(xué) 材料科學(xué)與工程學(xué)院， 哈爾濱 150001)
摘 要: 用XPS和GXRD研究了鋁合金等離子體基離子注入氮后再注入鈦?zhàn)詈髲?fù)合注入氮和鈦改性層的成分深度分布及相結(jié)構(gòu)，用XTEM觀察了改性層截面的組織結(jié)構(gòu)，用AFM觀察了改性層的表面形貌，在此基礎(chǔ)上測(cè)量了改性層的納米硬度，進(jìn)行了球-盤摩擦磨損試驗(yàn)。結(jié)果表明，鈦中間層使復(fù)合改性層的厚度有效增加，主要由α-Ti，TiN及TiO2組成， 且TiN及TiO2彌散分布在α-Ti基材中，使表面形貌有所改善，使表面硬度及耐磨性明顯提高。
關(guān)鍵字: 等離子體基離子注入；鈦中間層；結(jié)構(gòu)及性能
properties of modified layer produced by
plasma based ion implantation
（School of Materials Science and Engineering，
Harbin Institute of Technology，Harbin 150001，China）
Abstract:The structure of the aluminum alloy LY12 implanted with N, then with Ti, finally with N and Ti by plasma based ion implantation (PBII) was characterized using XPS, GXRD and XTEM. XPS shows that titanium layer makes the thickness of the modified layer lengthen effectively. GXRD shows that titanium layer consists of α-Ti, TiN and TiO2, with TiN and TiO2 dispersing in α-Ti substrate. Titanium layer also makes the surface appearance of the modified sample smoother than that of the sample without titanium layer. On the other hand, titanium layer makes the micro-hardness and tribological properties improve greatly.
Key words: plasma based ion implantation; titanium; structure and properties
