(華南理工大學 機電工程系， 廣州 510640)
摘 要: 在p-Si(100)基體上用熱絲CVD法沉積了球形金剛石薄膜。用XL30FEG掃描電鏡、X射線衍射儀及Raman光譜儀對不同沉積時間的球形金剛石的微觀形貌及組成成分進行了研究，并對其形成機制進行了分析。結果表明：球形金剛石的顆粒密度和形核密度一致，球形金剛石由微晶金剛石組成，晶粒尺寸為70～200nm；微晶金剛石是沉積過程中快速二次形核而形成，呈無序分布；球形金剛石薄膜以二次形核方式繁衍生長。
關鍵字: 金剛石；微晶；二次形核；化學氣相沉積法
ball-like diamond
（Department of Mechanical and Electric Engineering，
South China University of Technology，Guangzhou 510640,China）
Abstract:Ball-like diamond films were deposited in p-Si(100) substrate by a hot-filament chemical vapor deposition (CVD) method. The morphology and composition of ball-like diamond films deposited in different time were studied by means of XL30FEG SEM，XRD and Raman spectrum，and the ball-like diamond forming mechanism was also analyzed. The results indicate that the density of ball-like diamond grain is the same as its nuclei density. A ball-like diamond grain composes of micro-crystals of diamond. The size of micro-crystal diamond is only 70～200nm. The micro-crystal diamonds come from fast second nucleating on deposit ion process and assume disordered state. The ball-like diamond films grow up by means of multiplying of second nucleating.
Key words: diamond；micro-crystal；second nucleating；chemical vapor deposition
