(西安交通大學(xué) 金屬材料強(qiáng)度國家重點(diǎn)實(shí)驗(yàn)室， 西安 710049)
摘 要: 首先用Kroner模型計算了具有絲織構(gòu)的TiN薄膜的彈性矩陣。當(dāng)材料具有較強(qiáng)的絲織構(gòu)時，材料彈性矩陣的對稱關(guān)系將發(fā)生變化，得到的彈性矩陣與各向同性同種材料的彈性矩陣相差很大，相同分量的值一般相差在13～20 GPa之間。然后計算了TiN薄膜的彈性常數(shù)曲線隨ψ 角的分布。當(dāng)應(yīng)力測試方向不同時，即使是同一晶面，彈性常數(shù)也會產(chǎn)生差異，而且彈性常數(shù)隨ψ角的分布在低ψ 角區(qū)發(fā)生了彎曲。計算的TiN薄膜X射線彈性常數(shù)曲線的彎曲情況與實(shí)測的PVD TiN薄膜應(yīng)力測試曲線相似。
關(guān)鍵字: 彈性矩陣； 絲織構(gòu)； 薄膜； X射線衍射
of anisotropic films using Kroner method
（State Key Laboratory for Mechanical Behavior of Materials,
Xi′an Jiaotong University, Xi′an 710049, P. R. China）
Abstract:In order to study the effect of the fiber texture, the elastic matrix of TiN film using the Kroner models was calculated. When fiber texture is involved in films, the symmetry of the elastic matrix will change and there is a large difference of the elastic constants between the textured film and the isotropic. The same tensors of the textured and the isotropic films in the elastic matrix can be discrepant greatly, e.g. the difference is generally in 13～20 GPa. The distribution of the elastic constants of TiN film vs ψ angle was also calculated. The result shows that the difference can be introduced when the measured direction of the residual stress is different, though the diffraction plane does not change. In addition, the distribution curve of the elastic constants shows curvature in the range of the small ψ angle. The distribution curve of X-ray elastic constants is similar to the measured d—sin2ψ curve.
Key words: elastic matrix； fiber texture； thinfilms； X-ray diffraction
