(1. 射線束技術(shù)與材料改性教育部重點(diǎn)實(shí)驗(yàn)室，
北京師范大學(xué) 低能核物理研究所， 北京市輻射中心, 北京 100875;
2. 北京科技大學(xué) 材料科學(xué)與工程學(xué)院, 北京 100083；
3. 太原理工大學(xué) 表面工程研究所, 太原 030024)
摘 要: 研究了雙層輝光放電條件下鎳基合金Inconel 625的陰極濺射行為。結(jié)果表明：多組元鎳基合金由于各組元濺射率不同，產(chǎn)生擇優(yōu)濺射現(xiàn)象。Mo，Nb等低濺射率元素在陰極表面富集，Ni，Cr等高濺射率元素在陰極表面貧化，使陰極表面發(fā)生相變，形成含Mo，Nb較高的金屬間化合物析出相 P 相和Laves相。隨著陰極濺射電壓的增加，陰極合金元素濺射率增加；并且隨著陰極溫度升高，陰極濺射率也隨之增加。
關(guān)鍵字: 雙層輝光； 陰極濺射； 鎳基合金
XU Zhong3， ZHANG Tong-he1
（1. Key Laboratory in University for Radiation Beam Technology and Materials Modification, Institute of Low Energy Nuclear Physics of Beijing Normal University,
Beijing Rediation Center, Beijing 100875, P.R.Chiha;
2. School of Materials Science and Engineering,
University of Science and Technology Beijing， Beijing 100083, P.R.China;
3. Surface Engineering Institute, Taiyuan University of technology，
Taiyuan 030024, P.R.China）
Abstract:The cathode sputtering of nickel base alloy Inconel 625 was studied in double glow discharge. The results show that the preferential sputtering effect is happened in Ni-Cr-Mo-Nb alloy as the deference of element sputtering rates. The content of lower sputtering rate elements Mo and Nb increases while the higher sputtering rate elements Ni and Cr decrease in the surface layer， and the intermetallic phases P and Laves containing high concentration of Mo and Nb precipitate in surface layer. The sputtering rate increases with the increase of the cathode voltage and the temperature.
Key words: double glow; cathode sputtering; nickel base alloy
