(1. 武漢理工大學(xué) 材料復(fù)合新技術(shù)國(guó)家重點(diǎn)實(shí)驗(yàn)室,
武漢 430070;
2. 浦項(xiàng)工業(yè)大學(xué) 浦項(xiàng)加速器實(shí)驗(yàn)室, 韓國(guó))
摘 要: 利用X射線衍射應(yīng)力分析的sin2ψ法測(cè)量、計(jì)算出氮化硅陶瓷試樣的殘余應(yīng)力。分析表明，經(jīng)平面磨磨削后的氣壓燒結(jié)氮化硅陶瓷試樣表面存在的殘余應(yīng)力為拉應(yīng)力，而再經(jīng)過表面拋光處理，則可以適當(dāng)?shù)亟档捅砻鏆堄鄳?yīng)力。
關(guān)鍵字: 殘余應(yīng)力；氣壓燒結(jié)；氮化硅
stress of ground surface of silicon
nitride ceramic
KIM Kyung-ryul2, JIANG Jun1
（1. State Key Laboratory of Advanced Technology for
Materials Synthesis and Processing, Wuhan University of
Technology, Wuhan 430070, China;
2. Pohang Accelerator Laboratory, Pohang University of
Technology, Postech, Po hang 790784, Korea）
Abstract:The principle of residual stress analysis by X-ray diffraction was introduced. And the residual stress of the surface of silicon nitride ceramic, which sintered by GPS and ground by plane grind, was tested and computed by the method of sin2ψ of X-ray diffraction analysis. The results indicate that there are tensile stresses in the surface of silicon nitride ceramic, and polishing can reduce the residual stress.
Key words: residual stress; gas pressure sinter; silicon nitride
