黃新泉2
(1. 四川大學(xué) 物理系 輻射物理及技術(shù)教育部重點(diǎn)實(shí)驗(yàn)室， 成都 610064；
2. 中國(guó)核動(dòng)力研究設(shè)計(jì)院 核燃料及材料國(guó)家重點(diǎn)實(shí)驗(yàn)室， 成都 610041)
摘 要: Ti-2Al-2.5Zr合金中注入能量為75keV的N+離子，注入劑量為3×1017/cm2和8×1017/cm2，注入過(guò)程樣品的溫度低于200℃。N+離子在Ti-2Al-2.5Zr合金中的射程借助TRIM 96程序計(jì)算為1222Å。注入后的樣品用X射線衍射方法(XRD)以及光電子能譜方法(XPS)進(jìn)行分析。XRD衍射譜表明有新相生成，經(jīng)分析為T(mén)iN和TiO2，但這些新相的峰非常微弱，很難區(qū)分。XPS寬程掃描譜表明注入后樣品表面主要為T(mén)i，C，N和O。XPS關(guān)于Ti2p和N1s窄程掃描譜表明N+離子注入后在合金表面確實(shí)形成了TiN和TiO2。
關(guān)鍵字: Ti-2Al-2.5Zr合金； N+離子注入； XRD； XPS
implantation into Ti-2Al-2.5Zr alloy
LIN Li-bin1, LI Yan-ling2， HUANG Xin-quan2
（1. Department of Physics， Key Laboratory for Radiation Physics and Technology of
Ministry of Education， Sichuan University， Chengdu 610064， P.R.China；
2. National Key Laboratory for Nuclear Fuel and Material，
Nuclear Power Research and Designing Institute of China， Chengdu 610041， P.R.China）
Abstract:Ti-2Al-2.5Zr alloys were implanted with 75keV N+ ions at temperature lower than 200℃ with implanting dosage of 3×1017/cm2 and 8×1017/cm2. The projected range was about 1222Å calculated by TRIM 96 program. The implanted samples were analyzed using X-ray diffractometer (XRD) and X-ray photoelectron spectrometer (XPS). The X-ray diffraction patterns show that the peaks correspond to new phases， TiN and TiO2 after N+ ion implantation. But the peaks for the phases are small and difficult to distinguish. XPS surveys show there are Ti，C，N and O. High-resolution XPS collections of the Ti2p and N1s binding energy show that TiN and TiO2 are formed after N+ ion implantation.
Key words: Ti-2Al-2.5Zr alloy; N+ ion implantation; XPS; XRD
