(1. 湖南大學(xué) 材料科學(xué)與工程院，長沙 410082；
2. 長沙學(xué)院 化學(xué)與環(huán)境工程系，長沙 410003)
摘 要: 以二水合醋酸鋅為原材料，采用溶膠−凝膠浸涂法在鈉鈣玻璃基片上制備了具有c軸擇優(yōu)取向的ZnO׃Al薄膜，考察了鋁摻雜濃度對薄膜結(jié)晶性與微觀組織結(jié)構(gòu)的影響。結(jié)果表明：鋁摻雜使ZnO薄膜(002)晶面的2θ向高角度方向偏移，c軸擇優(yōu)取向性增強(qiáng)，晶粒變小(15~20 nm)。當(dāng)鋁摻雜濃度(摩爾分?jǐn)?shù))為1%~2%時，微觀組織結(jié)構(gòu)變得致密均勻；當(dāng)鋁摻雜濃度大于2%時，發(fā)生顆粒團(tuán)聚現(xiàn)象；在高摻雜濃度下(5%和8%)，出現(xiàn)大尺寸片狀ZnO׃Al晶粒異常長大，生長出特殊形貌的薄膜。
關(guān)鍵字: ZnO׃Al薄膜；鋁摻雜；溶膠−凝膠法；擇優(yōu)取向生長
microstructure of ZnO׃Al thin films
（1. School of Materials Science and Engineering, Hunan University, Changsha 410082, China;
2. Department of Chemistry and Environmental Engineering, Changsha College, Changsha 410003, China）
Abstract:Al-doped zinc oxide thin films with c-axis-preferred orientation were prepared on soda-lime glass substrates via sol-gel dip-coating route by using zinc acetate dihydrate as the starting materials. The effects of Al-doping concentration on the crystallinity and microstructure of the films were systematically studied. The results show that Al-doping benefits c-axis-preferred orientation and leads to 2θ of (002) plane shifting to higher angle. The grains with sizes of 15−20 nm are refined with increasing Al-doping concentration. A homogeneous dense microstructure is obtained when Al-doping concentration (mole fraction) is 1%−2% while there are particle agglomerations when the Al-doping concentration is above 2%. As for higher doping concentration (5% and 8%), the films exhibit the exceptional growth of l, arge plate-like crystals and grow into a special morphology.
Key words: ZnO׃Al thin film; Al-doping; sol-gel; preferred orientation growth
