( 1. 長(zhǎng)春大學(xué) 應(yīng)用物理研究所， 長(zhǎng)春 130022；
2. 吉林大學(xué) 材料科學(xué)與工程學(xué)院，
吉林大學(xué)汽車材料教育部重點(diǎn)實(shí)驗(yàn)室， 長(zhǎng)春 130012)
摘 要: 采用直流磁控濺射方法， 以Ar和N2作為放電氣體， 在單晶Si(100)襯底上沉積了Fe-N薄膜。 采用X射線衍射儀(XRD)、 X射線光電子能譜分析儀(XPS)、 原子力顯微鏡(AFM)和超導(dǎo)量子干涉儀(SQUIDS)對(duì)所制備的樣品進(jìn)行了結(jié)構(gòu)、 成分、 形貌和磁性能分析， 研究了襯底溫度對(duì)薄膜的結(jié)構(gòu)、 形貌和磁性能的影響。 結(jié)果表明： 襯底溫度對(duì)Fe-N薄膜的結(jié)構(gòu)有重要的影響， 通過(guò)控制襯底溫度可以獲得單相γ′-Fe4N化合物薄膜； γ′-Fe4N具有較高的飽和磁化強(qiáng)度， 是非常有應(yīng)用前景的磁記錄介質(zhì)及磁頭功能材料。
關(guān)鍵字: Fe-N薄膜； 襯底溫度； 磁性能
Fe-N thin films
ZHENG Wei-tao2, ZONG Zhan-guo1
（ 1. Institute of Applied Physics, Changchun University, Changchun 130022, China;
2. School of Materials Science and Engineering, Key Laboratory of Automobile Materials of Ministry of Education, Jilin University, Changchun 130012, China）
Abstract: The single-phase γ′-Fe4N thin films were deposited on single crystal Si(100) substrates by DC magnetron sputtering using an Ar/N2 gas mixture. The structure and magnetic properties of the films were characterized by X-ray diffractrometry, X-ray photoelectron spectroscopy, atomic force microscopy and superconducting quantum interference device(SQUID). The effects of substrate temperature on the structures, composition, surface morphology and magnetic properties of the thin films were investigated. The results show that substrate temperature has important effects on the structure of Fe-N films. γ′-Fe4N phase has a higher saturation magnetization and lower roughness. The γ′-Fe4N thin films will become function materials which have super soft magnetic property.
Key words: Fe-N thin films; substrate temperature; magnetic properties
