( 1. 北京師范大學 射線束技術(shù)與材料改性教育部重點實驗室，
北京100875;
2. 北京師范大學 材料科學與工程系, 北京 100875;
3. 南昌大學 物理系， 南昌 330047)
摘 要: 利用MEVVA磁過濾等離子沉積技術(shù)制備了納米厚度的Fe顆粒薄膜， 并利用原子力顯微鏡和場發(fā)射掃描電子顯微鏡對其結(jié)構(gòu)進行了系統(tǒng)分析。 分析結(jié)果表明, 由于磁過濾的作用， 所制備的Fe納米薄膜結(jié)構(gòu)均勻， 不存在由于電弧蒸發(fā)引起的大顆粒沉積現(xiàn)象。 等離子體不同沉積角度直接影響納米薄膜的微觀結(jié)構(gòu)， 隨著沉積角度從90°下降到30°， 納米薄膜的結(jié)構(gòu)由起伏變化的納米聚晶結(jié)構(gòu)逐漸轉(zhuǎn)變?yōu)槌叨群捅砻娣植季鶆虻募{米晶結(jié)構(gòu)。 經(jīng)過高溫熱處理， 相比于垂直沉積的納米薄膜， 30°傾斜沉積制備的薄膜微觀結(jié)構(gòu)中大晶粒的數(shù)量顯著下降， 形成顆粒分布較好的納米顆粒薄膜。
關(guān)鍵字: MEVVA技術(shù)； Fe納米薄膜； 結(jié)構(gòu)
ZHENG Rui-ting1, 2, LIANG Chang-lin1, 2, CHEN Liang1, 2
（ 1. Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing 100875, China;
2. Department of Materials Science and Engineering, Beijing Normal University, Beijing 100875, China;
3. Department of Physics, Nanchang University, Nanchang 330047, China）
Abstract: The fabrication of Fe nano-films with MEVVA magnetically filtered plasma technique was investigated. The structures of Fe nano-films were systematically analyzed by the atomic force microscopy (AFM) and the field emission scanning electron microscopy (FESEM). The results show that the particle structures of Fe nano-film are well distributed because of the action of magnetic filter. The deposition angle of ions beam affects the microstructures of the films. The films with salient features become smooth and Fe nano-clusters are well distributed with the decrease of the deposition angle from 90° to 30°. Compared with the film produced under the normal incidence, the number of the large particles for films fabricated at the deposition angle of 30° decreases greatly and the nano-particles with better distribution and more uniform particle size are formed after high temperature treatment.
Key words: MEVVA technique; Fe nano-films; structure
