(哈爾濱工業(yè)大學(xué) 復(fù)合材料與結(jié)構(gòu)研究所， 哈爾濱 150080)
摘 要: 采用過(guò)濾陰極真空電弧技術(shù)， 通過(guò)施加不同襯底偏壓制備了非晶金剛石薄膜。 利用納米壓痕儀和光譜橢偏儀測(cè)試薄膜的力學(xué)性能和光學(xué)性能， 利用KLA-Tencor臺(tái)階儀測(cè)試硅襯底在薄膜沉積前后的曲率半徑， 并根據(jù)Stoney方程計(jì)算薄膜應(yīng)力， 利用可見(jiàn)光拉曼光譜和電子能量損耗譜研究了薄膜的微結(jié)構(gòu)。 實(shí)驗(yàn)表明： 當(dāng)襯底負(fù)偏壓為80 V時(shí)， 薄膜的硬度、 彈性模量、 光學(xué)帶隙和折射率均達(dá)到最大值， 隨著偏壓的升高或降低， 各參量分別降低； 此時(shí)， 薄膜的sp3雜化含量最高， 斜坡系數(shù)卻最小； 在寬紅外波段范圍內(nèi)， 薄膜的消光系數(shù)趨近于零， 即紅外透明； 另外， 薄膜具有接近金剛石的高硬度和高模量， 并且其微結(jié)構(gòu)以及光學(xué)和力學(xué)性能可調(diào)， 因此是一種優(yōu)異的紅外光學(xué)窗口增透保護(hù)薄膜材料。
關(guān)鍵字: 非晶金剛石； 過(guò)濾陰極真空電弧； 紅外保護(hù)膜
（ Center for Composite Materials, Harbin Institute of Technology,
Harbin 150080, China）
Abstract: Amorphous diamond (a-D) films deposited by filtered cathodic vacuum arc (FCVA) technology with different substrate bias were investigated. The mechanical properties were characterized with nanoindenter and the stress was calculated using Stoney equation. The optical properties were analyzed by spectroscopic ellipsometry and the microstructure was investigated by visible Raman spectroscopy and electron energy loss spectroscopy. The maximal hardness and elastic modulus consorting with the highest stress are presented as the negative substrate bias is 80V. With the bias increases or decreases, hardness, elastic modulus and stress descend gradually. However, the high impinging energy benefits the adhesion between the films and the substrate. Additionally, the optical gap and the refractive index exhibits the same changing regularities, whereas the minimal extinction coefficient is obtained at negative bias of 80 V. It is found that the negative bias of 80 V is the sp3-rich deposition condition according to the EELS measurements and the Raman slope coefficient. The changing rules of the mechanical and optical properties can be explained in light of the growth mechanism and microstructure of the films. In short, a-D films deposited by the FCVA technology are good at the infrared protective coatings because the films are transparent in the wide infrared band and the microstructure and properties can be modulated.
Key words: amorphous diamond; filtered cathodic vacuum arc; protective coatings
