( 1. 西安交通大學(xué) 理學(xué)院, 西安 710049;
2. 河南科技大學(xué) 材料工程系, 洛陽(yáng) 471039)
摘 要: 采用不同的磁控濺射和回火工藝制備了SmCo磁性薄膜。 用能譜儀對(duì)不同工藝濺射的樣品進(jìn)行了化學(xué)成分分析; 用透射電子顯微鏡和振動(dòng)樣品磁強(qiáng)計(jì)(VSM)研究了薄膜的顯微結(jié)構(gòu)和磁性能。 結(jié)果表明： 濺射態(tài)的薄膜為非晶態(tài)并具有軟磁特征； 當(dāng)回火溫度位于400~ 450℃之間時(shí)， 薄膜的微觀組織均勻細(xì)小， 且隨著回火溫度增加， 矯頑力增大， 并在450℃回火的樣品中得到了最大的矯頑力。 回火溫度500℃后， 薄膜微觀組織中晶粒出現(xiàn)了不均勻粗化， 矯頑力明顯降低。
關(guān)鍵字: SmCo薄膜；晶化； 顯微組織； 磁性能
（1. Scool of Science, Xi′an Jiaotong university,
Xian 710049, China;
2. Materials Science and Engineering, Luoyang Institute, Luoyagn 471039, China）
Abstract: Amorphous SmCo magnetic films were fabricated by magnetron sputtering. The microstructures were observed by transmission electron micrographs and magnetic properties were measured by vibrating sample measurement(VSM). TEM micrographs of the films show that the microstructures are changed with the post-deposition annealing temperatures. The microstructures of the films become non-uniform as the annealing temperature is higher than 500℃. VSM measurements reveal that the films reach an optimum magnetic properties as the annealing process is 450℃, 30min.
Key words: SmCo film; crystallization; microstructure; magnetic properties
