蘇偉濤1，李泳俠2， 鄒 丹2
( 1. 中南大學(xué) 材料科學(xué)與工程學(xué)院, 長沙 410083；
2. 湖南銀洲有色高技術(shù)有限公司， 長沙 410083)
摘 要: 采用不同的預(yù)處理方式浸蝕YG6硬質(zhì)合金基體表面， 隨后在熱絲化學(xué)氣相沉積裝置上沉積了金剛石薄膜。用掃描電子顯微鏡、 X射線衍射儀以及洛氏硬度計(jì)對樣品進(jìn)行了分析檢測。結(jié)果表明： 一步或兩步浸蝕法都能抑制沉積過程中基體表面鈷的不利影響。 采用兩步法， 即Murakami劑30min腐蝕碳化鎢相，再用H2SO4∶H2O2=3∶7（體積比）混合酸腐蝕30s去除鈷相， 基體表面粗糙， 金剛石薄膜形核密度高，結(jié)晶質(zhì)量較好， 金剛石涂層與硬質(zhì)合金基體結(jié)合良好。
關(guān)鍵字: 金剛石薄膜； 硬質(zhì)合金； 表面預(yù)處理
LI Yong-xia2, ZOU Dan2
（ 1 . School of Materials Science and Engineering,
Central South University,Changsha 410083, China;
2. Hunan Yingzhou Nonferrous Metals Hi-Tech Limited Company, Changsha 410083, China）
Abstract: The diamond films were deposited on the cemented WC-6%Co with different surface pretreatments via hot filament chemical vapor deposition. The surface morphology, texture and adhesion of the diamond films were investigated by means of scanning electron microscope, X-ray diffractometer and Rockwell hardness tester. The results show that one- and two-step chemical etching pretreatments can effectively reduce the content of cobalt on the surface of WC substrate. Comparing with different etching technology, firstly using Murakami reagent for 30min, then an H2SO4∶H2O2=3∶7(volume ratio) solution for 30s, the diamond nucleation density is greatly increased, resulting in a good adhesion between diamond film and the substrate.
Key words: diamond film; cemented carbide; surface pretreatment
