(國防科技大學 材料工程與應用化學系， 長沙 410073)
摘 要: 采用磁控濺射法制備了TbDyFe超磁致伸縮非晶薄膜， 研究了真空熱處理退火及軟磁性Fe薄膜的交換耦合作用對TbDyFe超磁致伸縮的低場磁致伸縮性能的影響。 研究結(jié)果表明： 真空退火處理通過改善薄膜的微結(jié)構(gòu)及應力狀態(tài)， 有效地提高薄膜了的低場磁敏性能； 易磁化方向平行于膜面的軟磁Fe膜的復合， 使薄膜平行于膜面的易磁化性能大大提高， 復合薄膜的強制磁致伸縮系數(shù)（dλ/dH）提高3倍以上。 單層薄膜厚度越小， 交換作用越強， 低場磁致伸縮性能越好； 當薄膜厚度大于交互作用距離、 薄膜的總厚度不變時， 單層薄膜的厚度變化對復合薄膜的磁致伸縮性能沒有影響。
關鍵字: TbDyFe薄膜； 超磁致伸縮； 磁控濺射； 磁性復合
（Department of Material Engineering and Applied Chemistry,
National University of Defence Technology,
Changsha 410073, China）
Abstract: Amorphous TbDyFe giant magnetostriction film was prepared by magneto sputtering. The effects of vacuum annealing and coupling of Fe layer between the TbDyFe films on their magnetostrictive characteristics were investigated, respectively. The results show that the annealing treatment can promote the magnetostrictive sensibility of the amorphous single-layer film. For the TbDyFe/Fe multi-layer film, especially, the value of dλ/dH is three times of that of the single-layer film. The smaller the thickness of each layer is, the better its magnetostrictive properties are.
Key words: TbDyFe film; giant magnetostriction; magneto sputtering; magnetic coupling
