( 湖南大學(xué) 材料科學(xué)與工程學(xué)院, 長沙 410082)
摘 要: 采用X射線吸收光譜研究了熱絲化學(xué)氣相沉積（CVD）合成的納米金剛石薄膜和脈沖激光沉積的納米SiC薄膜。結(jié)果表明：納米金剛石薄膜的碳K邊X射線吸收精細(xì)結(jié)構(gòu)光譜顯示的激發(fā)峰相當(dāng)于微米金剛石薄膜的藍(lán)移，是量子效應(yīng)的顯著特征，證明制備的是納米金剛石薄膜，與高分辨透射電鏡的結(jié)果完全吻合；納米SiC薄膜的硅K邊X射線吸收精細(xì)結(jié)構(gòu)光譜和擴(kuò)展X射線吸收精細(xì)結(jié)構(gòu)光譜也顯示了納米薄膜短程有序的結(jié)構(gòu)特征，表明獲得的是納米SiC薄膜。
關(guān)鍵字: 納米薄膜；X射線吸收光譜；納米金剛石；藍(lán)移
nanoscale thin films
（ College of Materials Science and Engineering,
Hunan University, Changsha 410082, China）
Abstract: Nanodiamond films synthesized by hot-filament chemical vapor deposition method and SiC nanoscale thin film deposited by pulsed laser deposition were investigated by X-ray absorption spectroscopy. The results show that C K-edge NEXAFS of the nanodiamond film exhibits a blue-shifted exciton peak relative to that of microscale diamond film. These features are characteristics of quantum confinement behavior. The results confirm the presence of nanodiamond film as revealed by transmission electron microscopy. The Si K-edge NEXAFS and EXAFS of the SiC nanoscale thin film also exhibit a significant long-range disorder that is the character of nanoscale materials, i.e. the SiC thin film is a nanoscale thin film.
Key words: nanoscale thin film; X-ray absorption spectroscopy; nanodiamond; blue-shift
