沉積Ti-B-N薄膜的結構與性能
( 1. 西安交通大學 金屬材料強度國家重點實驗室，西安710049；
2. 慕尼黑工業(yè)大學無機材料化學研究所，慕尼黑D-85747)
摘 要: 研究了射頻等離子體輔助化學氣相沉積獲得的Ti-B-N薄膜的微觀組織結構和力學性能。結果表明：B的加入使Ti-B-N薄膜中出現TiN納米晶、BN非晶和TiB2非晶（nc-TiN/a-BN/a-TiB2）的復相結構。Ti-B-N薄膜組織致密，晶粒細小，薄膜硬度顯著提高。用球盤式磨損實驗考察了薄膜的摩擦學特性。與TiN相比，Ti-B-N薄膜抗磨損性能有顯著提高，磨損機制為微觀切削與疲勞磨損共同作用，但摩擦系數較TiN稍高。
關鍵字: 射頻等離子體輔助化學氣相沿積；Ti-B-N薄膜；硬度；耐磨性
enhanced chemical vapor depostion
P Karvankova2, S Veprek2
（ 1. State Key Laboratory for Mechanical Behavior of Materials,
Xi'an Jiaotong University, Xi'an 710049, China;
2. Institute for Chemistry of Inorganic Materials,
Technical University Munich, Munich D-85747, Germany）
Abstract: The microstructure and properties of Ti-B-N coatings prepared by radio-frequency plasma-enhanced chemical vapor deposition (rf-PCVD) were investigated. The coatings were characterized by energy dispersive X-ray analysis, X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy and optical microscopy. Pin-on-disk tribometer and microscopic hardness tester were used to evaluate the mechanical properties of the coatings. The results show that the structure of the coatings is nanocomposite, where nanocrystalline TiN is embedded in the amorphous matrix of BN and TiB2. The micro-hardness of Ti-B-N coatings is much higher than that of TiN coatings. The wear resistance of Ti-B-N coatings with a certain addition of boron is remarkably increased, which is caused by the change of friction mechanism of the coatings, although its friction coefficient is a little higher than that of TiN.
Key words: plasma-enhanced chemical vapor deposition; Ti-B-N coating; hardness; wear-resistance
