(1. 昆明理工大學(xué) 材料與冶金工程學(xué)院, 昆明 650093;
2. 東京電機(jī)大學(xué) 知能機(jī)械工學(xué)科, 鳩山, 埼玉, 日本 350-0394;
3. 昆明理工大學(xué) 機(jī)電工程學(xué)院, 昆明 650093)
摘 要: 采用1×1016 ions/cm2的注入劑量對(duì)TiNi形狀記憶合金進(jìn)行氮離子注入， 注入加速電壓為 50 keV。 采用X射線衍射和X射線光電子能譜對(duì)氮離子注入前后 TiNi形狀記憶合金表面的物相以及化學(xué)成分進(jìn)行了分析。 結(jié)果表明, 氮離子注入前后TiNi 合金表面都被氧化。 氮離子注入前TiNi形狀記憶合金表面存在少量TiO2、 Ti3O5和Ti2O3。 氮離子注入后的TiNi形狀記憶合金表面有TiN新相生成， 且在氮離子注入后的TiNi形狀記憶合金表面還存在少量TiO2、 Ti3O5 。
關(guān)鍵字: TiNi形狀記憶合金； 表面分析； 氮離子注入
（ 1. Faculty of Materials and Metallurgical Engineering,
Kunming University of Science and Engineering, Kunming 650093, China;
2. Department of Intelligent Mechanical Engineering, Tokyo Denki University, Hatoyama, Hiki-Gun Saitama, Japan 350-0394;
3. Faculty of Mechanical and Electrical Engineering,
Kunming University of Science and Engineering, Kunming 650093, China）
Abstract: TiNi shape memory alloy samples were nitrogen-ion implanted with the implantation dose of 1×1016 ions/cm2 and the acceleration voltages of 50 keV. X-ray diffraction analysis and X-ray photoelectron spectroscopy analysis were used to characterise the phase, the chemical composition and chemical state of the surface layer of the TiNi alloy samples and nitrogen-ion-implanted TiNi alloy samples. The results show that the surfaces of the TiNi alloy and nitrogen-ion-implanted TiNi alloy are all oxidized. TiO2, Ti2O3 and Ti3O5 exist on the TiNi sample surface. New phase TiN is produced on the surface of the nitrogen-ion-implanted TiNi sample, and there also exist small amounts of TiO2 and Ti3O5 on the nitrogen-ion-implanted TiNi sample surface.
Key words: TiNi shape memory alloy; surface analysis; nitrogen ion-implantation
