(1. 中南大學(xué) 粉末冶金國家重點實驗室， 長沙 410083；
2. 株洲鉆石切削刀具股份有限公司， 株洲 412007)
摘 要: 采用EPMA、 XRD、 SEM、 TEM、 HRTEM、 EDX、 納米壓痕、 氧化實驗和切削實驗研究了磁控濺射在硬質(zhì)合金基體上沉積TiN 涂層和(Ti, Al)N涂層的微觀組織結(jié)構(gòu)和性能。 結(jié)果表明： TiN涂層晶粒為喇叭口柱狀晶， (Ti, Al)N涂層為面心立方平直柱狀晶，由于固溶了Al元素， (Ti, A l)N涂層呈(200)面擇優(yōu)生長； (Ti, Al)N涂層在硬質(zhì)合金基體上無外延生長； (Ti, Al)N涂層在800 ℃氧化后形成Al2O3/TiO2/(Ti, Al)N的分層結(jié)構(gòu)； (Ti, Al)N涂層具有更高的硬度和更好的切削性能。
關(guān)鍵字: (Ti, Al)N涂層； 硬質(zhì)合金； 外延生長； 氧化性能； 切削性能
(Ti, Al)N coating
WANG Xiu-quan1
（ 1. State Key Laboratory of Powder Metallurgy,
Central South University, Changsha 410083, China;
2. Zhuzhou Cemented Carbide Cutting Tools Co. LTD.,
Zhuzhou 412007, China）
Abstract: The properties of magnetron sputtered TiN and (Ti, Al)N coatings grown on cemented carbide substrates were studied by electron probe microanalysis (EPMA), X-ray diffractometry (XRD), scanning electron microscopy (SEM), nanoindentation, energy dispersive X-ray spectroscopy (EDX), oxidation experiment and cutting tests. The results show that TiN coating is bell mouth columnar structures and (Ti, Al)N coating is fcc straight columnar structures. The (Ti, Al)N coating shows a fairly strong (200) preferred orientation because Ti atoms in the TiN lattice are substituted by Al atoms. The epitaxial growth is not found between (Ti, Al)N coating and substrate. The (Ti, Al)N coating becomes Al2O3/ TiO2/(Ti, Al)N multilayer after oxidated at 800 ℃. The (Ti, Al)N coating exhibits higher hardness, excellent cutting performance compared with TiN coating.
Key words: (Ti, Al)N coating; cemented carbide; epitaxial growth; oxidation properties; cutting properties
