(1. 昆明理工大學(xué) 云南省新材料制備與加工重點(diǎn)實(shí)驗(yàn)室，昆明 650093；
2. 上海交通大學(xué) 材料科學(xué)與工程學(xué)院，上海 200030；
3. 昆明理工大學(xué) 機(jī)電工程學(xué)院，昆明 650093)
摘 要: 研究磁控濺射法制備的Cr-Si-Ni和Cr-Si-Ni-Al電阻薄膜在模擬的堿性環(huán)境(NaOH溶液)中，介質(zhì)溶液濃度和溫度對(duì)薄膜電學(xué)穩(wěn)定性的影響及其機(jī)理。結(jié)果表明：經(jīng)熱處理后呈納米晶結(jié)構(gòu)的2種薄膜在低溫低濃度的堿性溶液中具有較好的電學(xué)穩(wěn)定性和耐腐蝕性能，但是，隨著溶液濃度和溫度的增大其電學(xué)穩(wěn)定性和耐腐蝕性能急劇下降，特別是在高溫高濃度的堿性溶液中薄膜在很短時(shí)間內(nèi)就出現(xiàn)性能劣化現(xiàn)象；2種薄膜在低溫低濃度的堿性溶液中能夠迅速地在膜層表面形成穩(wěn)定的鈍化保護(hù)層，從而有效地抑制溶液離子對(duì)薄膜內(nèi)層的進(jìn)一步腐蝕；而在高溫或高濃度的堿性溶液中薄膜表面難以形成穩(wěn)定的鈍化保護(hù)層。
關(guān)鍵字: CrSi(Ni, Al)；電阻薄膜；堿性環(huán)境；電學(xué)穩(wěn)定性；腐蝕行為；劣化機(jī)理
（1. Key Laboratory of Advanced Materials of Yunnan Province,
3. School of Mechanical and Electrical Engineering,
Kunming University of Science and Technology, Kunming 650093, China
Abstract:Influence of solution concentration and temperature of the medium on electrical properties stability and degradation mechanism of magnetron sputtered Cr-Si-Ni and Cr-Si-Ni-Al resistive films were investigated in simulated alkaline environments. The results reveal that the nanocrystalline Cr-Si-Ni and Cr-Si-Ni-Al films in lower temperature and solution concentration of alkaline solutions have better electrical properties stability and corrosion properties. However, with increasing solution concentration and temperature of the medium solutions, the electrical properties stability and corrosion properties of the two types of films are decreased steeply. Especially, the degradation of the films can be observed in very short time in higher temperature and solution concentration of the alkaline solutions. The surface of the two types of films can form a dense and stable passive protective layer in lower temperature and solution concentration of alkaline solutions, and that the formed passive layer exhibits a good corrosion inhibition effects. Nevertheless, in higher temperature or solution concentration of the alkaline solutions, the formation of stable passive layer is very difficulty.
Key words: CrSi(Ni, Al); resistive film; alkaline environment; electrical stability; corrosion behavior; degradation mechanism
