Abstract:Grain preferential orientation of Ag/Ni multilayered films with different layer thicknesses (each Ag and Ni layer consists of 5, 8, 20 and 40 atomic planes for different films respectively) have been investigated by transmission electron microscopy. For Ag and Ni grains of fcc lattice structure, there is a dominant [111] preferential orientation along the growth direction, the film is mainly [111] textured. But the texture axis may deviate for about 20°and some extend of〈121〉texture may be formed as the result. Increasing of the layer thickness restrains this axial deviation and enhances [111] texture. The electron diffraction analysis indicates that multilayered film may consist of columnar structure, Ag and Ni grains in each column take the same orientation while grains in adjacent columns have correlated but somewhat different in-plane orientations. At the first stage of deposition of layers on the glass substrate, the grains show preferential orientation in growth direction only, the in-plane orientations are at random. The in-plane texture of the film is formed when the deposition is further proceeded.

Key words: multilayered film　electron diffraction　preferential orientation　texture