Abstract:The microstructure and mechanical properties of Ti-B-N film after heat treatment under different temperatures were studied. The adhesion of the heat-treated film increased and the higher the treatment temperture, the higher the adhesion. When the treatment temperature was not higher than 600℃, the grain did not grow and no obvious change took place in the microstructure and the hardness of the film. When the treatment temperature reached 700 or 800℃, the hardness of the film decreased greatly, the grain was obviously growing, and the supersaturation metastable phase transformed into stable phase to form alternating slice structure within the grain of the film. The thickness of the slice was several dozen nanometres. It was found that some grains were TiN slice alternating with Ti₂N slice, the other grains were Ti₂N slice alternating with Ti-B-N phase slice and certain orientation relationship existed among them.

Key words: heat treatment　Ti-B-N film　slice structure