（1. State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China;

2. School of Physics Science and Technology, Central South University, Changsha 410083, China）

         

         
Abstract:Fe46Co44B10/SiO2 nano-multilayers were synthesized by radio frequency magnetron sputtering. The thickness of individual layer was designed and controlled in nano-meter. The effect of thickness of ferromagnetic layer, insulative layer or the total number of layers on the intrinsic characteristics and microwave permeability were investigated respectively. The results show that, saturation magnetization changes obviously with different thicknesses of ferromagnetic layer or insulative layer, but coercivity changes little and remains small. When the thickness of ferromagnetic layer and insulative layer keeps 1.5 and 1.3 nm respectively and the number of the total layers increases from 10 to 90, coercivity reduces and resistivity of the films improves from 0.25 to 2.22 Ω∙m. The resonant frequency locates at the point higher than 2 GHz and the imaginary part of complex permeability at 2 GHz is larger than 150. These multilayer films can be applied in the field of micromagnetic devices or anti-interference of electromagnetic wave.
         
 
         
Key words: Fe46Co44B10/SiO2 nano-multilayers; magnetron sputtering; electromagnetic characteristics; complex permeability